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IEEE
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2016;35;9;10.1109/TCAD.2015.2513670
Algorithms
design
manufacturability
performance
routing
self-aligned double pattering (SADP) lithography
Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process
Iou-Jen Liu
Shao-Yun Fang
Yao-Wen Chang
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