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IEEE
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2015;34;3;10.1109/TCAD.2014.2385761
Algorithms
Design
Performance
Multiple electron beam lithography
stitch
routing
manufacturability
Stitch-Aware Routing for Multiple E-Beam Lithography
Iou-Jen Liu
Shao-Yun Fang
Yao-Wen Chang
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